LiPON Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing LiPON films returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-Assisted ALD of LiPO(N) for Solid State Batteries
2Atomic Layer Deposition of the Solid Electrolyte LiPON
3Stabilization of Lithium Metal Anodes by Hybrid Artificial Solid Electrolyte Interphase
4Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes