Your search for plasma enhanced atomic layer deposition publications discussing LiPON films returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Deposition of the Solid Electrolyte LiPON|
|2||Solid Electrolyte Lithium Phosphous Oxynitride as a Protective Nanocladding Layer for 3D High-Capacity Conversion Electrodes|
|3||Stabilization of Lithium Metal Anodes by Hybrid Artificial Solid Electrolyte Interphase|
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