Your search for plasma enhanced atomic layer deposition publications discussing Ta films returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||A Chemical Reaction Path Design for the Atomic Layer Deposition of Tantalum Nitride Thin Films|
|2||Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition|
|3||Plasma-enhanced atomic layer deposition of Ta and Ti for interconnect diffusion barriers|
|4||Plasma-enhanced atomic layer deposition of tantalum thin films: the growth and film properties|
|5||Radical Enhanced Atomic Layer Deposition of Metals and Oxides|
|6||The Growth of Tantalum Thin Films by Plasma-Enhanced Atomic Layer Deposition and Diffusion Barrier Properties|
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