TiCN Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications discussing TiCN films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Tunable Work-Function Engineering of TiC-TiN Compound by Atomic Layer Deposition for Metal Gate Applications|
|2||Plasma Enhanced Atomic Layer Deposition of TiCxNy Film with Various Reactive Gases|