Your search for plasma enhanced atomic layer deposition publications discussing TiCN films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Plasma Enhanced Atomic Layer Deposition of TiCxNy Film with Various Reactive Gases|
|2||Tunable Work-Function Engineering of TiC-TiN Compound by Atomic Layer Deposition for Metal Gate Applications|
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