SiCxNy Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing SiCxNy films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1SiCxNy-based resistive and threshold switching by using single precursor plasma-enhanced atomic layer deposition
2Study on SiN and SiCN film production using PE-ALD process with high-density multi-ICP source at low temperature