CoN Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications discussing CoN films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films |
| 2 | Plasma enhanced atomic layer deposition of cobalt nitride with cobalt amidinate |