Your search for plasma enhanced atomic layer deposition publications discussing Sb2Te3 films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Low-temperature SiON films deposited by plasma-enhanced atomic layer deposition method using activated silicon precursor|
|2||Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon|
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