HfLaOx Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing HfLaOx films returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
2Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
3Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition
4Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
5Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
6Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks