HfLaOx Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing HfLaOx films returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks
2Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
3Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
4Properties of HfLaO MOS capacitor deposited on SOI with plasma enhanced atomic layer deposition
5Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
6Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films