Your search for plasma enhanced atomic layer deposition publications discussing In2(S,O)3 films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Study of Atomic Layer Deposition of Indium Oxy-sulfide films for Cu(In,Ga)Se2 solar cells|
|2||Synthesis of indium oxi-sulfide films by atomic layer deposition: The essential role of plasma enhancement|
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