Ge Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ge films returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer epitaxy of germanium
2Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium
3GeSbTe deposition for the PRAM application
4Influence of Substrates on the Nucleation and Growth Behaviors of Ge2Sb2Te5 Films by Combined Plasma-Enhanced Atomic Layer and Chemical Vapor Deposition
5Atomic hydrogen-assisted ALE of germanium