VN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing VN films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
2Plasma-enhanced atomic layer deposition of titanium vanadium nitride


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