B2O3 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing B2O3 films returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process
2Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon
3Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon