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HfAlOx Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing HfAlOx films returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
2High-κ insulating materials for AlGaN/GaN metal insulator semiconductor heterojunction field effect transistors
3Properties of HfAlO film deposited by plasma enhanced atomic layer deposition
4Tailoring the Electrical Properties of HfO2 MOS-Devices by Aluminum Doping

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