HfAlOx Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing HfAlOx films returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Thermal stability of antiferroelectric-like Al:HfO2 thin films with TiN or Pt electrodes
2Properties of HfAlO film deposited by plasma enhanced atomic layer deposition
3Tailoring the Electrical Properties of HfO2 MOS-Devices by Aluminum Doping
4A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
5High-κ insulating materials for AlGaN/GaN metal insulator semiconductor heterojunction field effect transistors