Nb Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Nb films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition
2Radical Enhanced Atomic Layer Deposition of Metals and Oxides