Nb Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications discussing Nb films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Radical Enhanced Atomic Layer Deposition of Metals and Oxides |
| 2 | Compositional and electrical modulation of niobium oxide thin films deposited by plasma-enhanced atomic layer deposition |