Ru-WCN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ru-WCN films returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

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1Development of plasma-enhanced atomic layer deposition grown Ru-WCN mixed phase films for nanoscale diffusion barrier and copper direct-plate applications


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