Plasma Study Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Plasma Study films returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Development and characterization of an atmospheric pressure plasma reactor compatible with spatial ALD
2Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
3Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy