TiMoN Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications discussing TiMoN films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
|Plasma-enhanced atomic layer deposition of titanium molybdenum nitride: Influence of RF bias and substrate structure