WN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing WN films returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	A controlled growth of WNx and WCx thin films prepared by atomic layer deposition
2	A New Pulse Plasma Enhanced Atomic Layer Deposition of Tungsten Nitride Diffusion Barrier for Copper Interconnect
3	Effects of NH3 pulse plasma on atomic layer deposition of tungsten nitride diffusion barrier
4	Investigation of Tungsten Nitride Deposition Using Tungsten Hexafluoride Precursor for Via and Plug Metallization
5	Method to enhance atomic-layer deposition of tungsten-nitride diffusion barrier for Cu interconnect
6	Plasma-enhanced atomic layer deposition of tungsten nitride
7	Pulse plasma assisted atomic layer deposition of W–C–N thin films for Cu interconnects
8	WNx Film Prepared by Atomic Layer Deposition using F-Free BTBMW and NH3 Plasma Radical for ULSI Applications

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