Your search for plasma enhanced atomic layer deposition publications discussing MoN films returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu|
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: email@example.com
© 2014-2018 plasma-ald.com