MoN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing MoN films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
2Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu