Ce:HfZrO2 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ce:HfZrO2 films returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1CeO2 Doping of Hf0.5Zr0.5O2 Thin Films for High Endurance Ferroelectric Memories