GaN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing GaN films returned 39 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A route to low temperature growth of single crystal GaN on sapphire
2Atomic layer deposition of GaN at low temperatures
3Baking and plasma pretreatment of sapphire surfaces as a way to facilitate the epitaxial plasma-enhanced atomic layer deposition of GaN thin films
4Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100°C Using Sequential Surface Reactions
5Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures
6Growth kinetics for temperature-controlled atomic layer deposition of GaN using trimethylgallium and remote-plasma-excited NH3
7Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition
8Infrared study on low temperature atomic layer deposition of GaN using trimethylgallium and plasma-excited ammonia
9Layer-by-layer epitaxial growth of GaN at low temperatures
10Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition
11Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition
12Perspectives on future directions in III-N semiconductor research
13Plasma-enhanced atomic layer deposition of gallium nitride thin films on fluorine-doped tin oxide glass substrate for future photovoltaic application
14Protective capping and surface passivation of III-V nanowires by atomic layer deposition
15Self-Limiting Growth of GaN at Low Temperatures
16Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
17Structure-property relationship and interfacial phenomena in GaN grown on C-plane sapphire via plasma-enhanced atomic layer deposition
18Temperature-controlled atomic layer deposition of GaN using plasma-excited nitrogen source
19Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs
20Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition