NbTiN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing NbTiN films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1RF Characterization of Novel Superconducting Materials and Multilayers
2Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition