TiVN Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications discussing TiVN films returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
|Plasma-enhanced atomic layer deposition of titanium vanadium nitride