September 2022 Stats

The publication database currently has 1652 entries.

204 Films

274 Precursors

77 Dep Hardware Sets

253 Characteristics

91 Theses

5082 Authors

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2021 Year in Review

Recent Database Additions

Optical in situ monitoring of plasma-enhanced atomic layer deposition process The role of active species in the N₂ and N₂-H₂ RF afterglows on selective surface nitriding of ALD-grown TiO₂ films The Applications of Ultra-Thin Nanofilm for Aerospace Advanced Manufacturing Technology Texture of atomic layer deposited ruthenium Comparative study of structural electrical dielectric and ferroelectric properties of HfO₂ deposited by plasma-enhanced atomic layer deposition and radio frequency sputtering technique for the application in 1-T FeFET

Hyunjung Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyunjung Kim returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)₂
2	Characteristics of WN_xC_y films deposited using remote plasma atomic layer deposition with (^MeC_p)W(CO)₂(NO) for Cu diffusion barrier
3	Improvement of the thermal stability of nickel silicide using a ruthenium interlayer deposited via remote plasma atomic layer deposition
4	Remote plasma atomic layer deposition of silicon nitride with bis(dimethylaminomethyl-silyl)trimethylsilyl amine and N₂ plasma for gate spacer
5	The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer