Your search for plasma enhanced atomic layer deposition publications authored by Maarit Mäkelä returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors|
|2||Optimization of the Silver Nanoparticles PEALD Process on the Surface of 1-D Titania Coatings|
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