The publication database currently has 1559 entries.
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192 Films Compositions
265 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics
83 Theses
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Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition
Aluminum tri-isopropoxide as an alternative precursor for atomic layer deposition of aluminum oxide thin films
Plasma-enhanced atomic layer deposition of hafnium silicate thin films using a single source precursor
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T. Benkenstein Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by T. Benkenstein returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | New grating concepts in the NIR and SWIR spectral band for high resolution earth-observation spectrometers |
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| Erwin (W.M.M.) Kessels |
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| Mauritius C. M. (Richard) van de Sanden |
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