T. Benkenstein Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by T. Benkenstein returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | New grating concepts in the NIR and SWIR spectral band for high resolution earth-observation spectrometers |