Search 1559 plasma ALD publications by:
Search 1559 plasma ALD publications by:
T. Benkenstein Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by T. Benkenstein returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
---|---|
1 | New grating concepts in the NIR and SWIR spectral band for high resolution earth-observation spectrometers |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |