Jungwoo Oh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jungwoo Oh returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low temperature growth of Beryllium Oxide thin films prepared via plasma enhanced atomic layer deposition
2Improved dielectric properties of BeO thin films grown by plasma enhanced atomic layer deposition