Jay J. Senkevich Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Jay J. Senkevich returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
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1 | Plasma-Assisted Atomic Layer Deposition of Palladium |
2 | Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces |