Jay J. Senkevich Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jay J. Senkevich returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Inductively Coupled Hydrogen Plasma-Assisted Cu ALD on Metallic and Dielectric Surfaces
2Plasma-Assisted Atomic Layer Deposition of Palladium