Sangwon Seo Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Sangwon Seo returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
---|---|
1 | Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor |