Y.-H. Song Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Y.-H. Song returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Influence of Working Pressure on the Al2O3 Film Properties in Plasma-Enhanced Atomic Layer Deposition|
|2||Working gas effect on properties of Al2O3 film in plasma-enhanced atomic layer deposition|