M. Ambartsumov Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by M. Ambartsumov returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Growing c-axis oriented aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures|
|2||Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition|