Shohei Ogura Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Shohei Ogura returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
Number | Title |
---|---|
1 | Effect of hydrogen plasma treatment on the passivation performance of TiOx on crystalline silicon prepared by atomic layer deposition |