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  • Plasma-Enhanced Atomic Layer Deposition
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Ryan M. Martin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ryan M. Martin returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films
2Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition