Satoshi Sugahara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Satoshi Sugahara returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic hydrogen-assisted ALE of germanium
2Atomic layer epitaxy of germanium
3Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon