Satoshi Sugahara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Satoshi Sugahara returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic hydrogen-assisted ALE of germanium
2Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon
3Atomic layer epitaxy of germanium
4Hydrogen-induced abstraction mechanism of surface methyl groups in atomic-layer-epitaxy of germanium