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Andrew D. Koehler Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Andrew D. Koehler returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
2Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
3Atomic Layer Epitaxy AlN for Enhanced AlGaN/GaN HEMT Passivation
4ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices
5Investigation of AlGaN/GaN HEMTs Passivated by AlN Films Grown by Atomic Layer Epitaxy