Edmund P. Burte Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Edmund P. Burte returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Use of B2O3 films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
2Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
3Plasma-assisted atomic layer deposition of germanium antimony tellurium compounds