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Jinsong Zhang Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Jinsong Zhang returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Plasma-enhanced atomic layer deposition of superconducting niobium nitride |
| 2 | Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition |