Shaoren Deng Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Shaoren Deng returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing |