Dirk J. Hagen Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Dirk J. Hagen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting|
|2||Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD|