Dirk J. Hagen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Dirk J. Hagen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of Cobalt Phosphide for Efficient Water Splitting
2Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD