Hyo Jin Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyo Jin Kim returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
2Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
3Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
4Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors