Jorg Haeberle Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jorg Haeberle returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

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1Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films


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