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David R. Boris Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by David R. Boris returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources
2Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
3Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
4Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
5The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
6Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
7Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition