Plasma ALD, LLC Consulting


2024 Year in Review


The publication database currently has 1748 entries.
219 Films
293 Precursors
81 Dep Hardware Sets
258 Characteristics
99 Theses
5407 Authors

Use Advanced Search for more complex searches


2021 Year in Review
2023 Year in Review
2022 Year in Review
ALD Links


David R. Boris Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by David R. Boris returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources
2Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
3Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO2 Films Grown by the Plasma-Assisted Atomic Layer Deposition
4Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
5Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
6The role of plasma in plasma-enhanced atomic layer deposition of crystalline films
7Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition

© 2014-2025 plasma-ald.com