December 2022 Stats

The publication database currently has 1659 entries.

204 Films

274 Precursors

78 Dep Hardware Sets

253 Characteristics

91 Theses

5095 Authors

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Comparison of AlF₃ thin films grown by thermal and plasma enhanced atomic layer deposition Properties and Mechanism of PEALD-In₂O₃ Thin Films Prepared by Different Precursor Reaction Energy Uniformity of HfO₂ Thin Films Prepared on Trench Structures via Plasma-Enhanced Atomic Layer Deposition Optimization of Y₂O₃ dopant concentration of yttria stabilized zirconia thin film electrolyte prepared by plasma enhanced atomic layer deposition for high performance thin film solid oxide fuel cells Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy

David R. Boris Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by David R. Boris returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Effect of varying plasma properties on III-nitride film growth by plasma enhanced atomic layer epitaxy
2	Impact of Growth Conditions on the Phase Selectivity and Epitaxial Quality of TiO₂ Films Grown by the Plasma-Assisted Atomic Layer Deposition
3	Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
4	Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low T_e plasma sources
5	Phase Control of Crystalline Ga₂O₃ Films by Plasma-Enhanced Atomic Layer Deposition
6	Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
7	The role of plasma in plasma-enhanced atomic layer deposition of crystalline films