Alan Hayes Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Alan Hayes returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Low-temperature (≤200°C) plasma enhanced atomic layer deposition of dense titanium nitride thin films |