Saptarshi Mandal Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Saptarshi Mandal returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Al2O3 Insertion Layer for Improved PEALD SiO2/(Al)GaN Interfaces