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Hisashi Ohba Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hisashi Ohba returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
2RT Atomic Layer Deposition of Al2O3 By Using Remote Plasma Excited Water Vapor

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I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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