Hisashi Ohba Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hisashi Ohba returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Reaction mechanism of room temperature HfO2 atomic layer deposition using remote plasma excited water and oxygen
2RT Atomic Layer Deposition of Al2O3 By Using Remote Plasma Excited Water Vapor


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