Ville Rontu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ville Rontu returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Tribological properties of thin films made by atomic layer deposition sliding against silicon
2Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
3Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support