Mikko Laitinen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mikko Laitinen returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
2Properties of AlN grown by plasma enhanced atomic layer deposition
3Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas