Mikko Laitinen Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Mikko Laitinen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas|
|2||Properties of AlN grown by plasma enhanced atomic layer deposition|