Mikko Laitinen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mikko Laitinen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

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1Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
2Properties of AlN grown by plasma enhanced atomic layer deposition


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