Chang Young Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chang Young Kim returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Characteristics of SiOC(-H) Thin Films Prepared by Using Plasma-enhanced Atomic Layer Deposition
2Interface Properties of Nickel-silicide Films Deposited by Using Plasma-assisted Atomic Layer Deposition
3Method of sealing pores in porous low-k SiOC(-H) films fabricated using plasma-assisted atomic layer deposition