Z.X. Chen Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Z.X. Chen returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Plasma-Enhanced Atomic Layer Deposition (PEALD) of TiN using the Organic Precursor Tetrakis(ethylmethylamido)Titanium (TEMAT)|