Sang-Kyun Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sang-Kyun Park returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
2Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
3Lanthanum-Oxide Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
4Correlation of carbon content with the thermal stability of ruthenium deposited by using RF-direct plasma-enhanced atomic-layer deposition