Lutz Kirste Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Lutz Kirste returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Densification of Thin Aluminum Oxide Films by Thermal Treatments|
|2||Mechanical and electrical properties of plasma and thermal atomic layer deposited Al2O3 films on GaAs and Si|